| 摘要 |
PROBLEM TO BE SOLVED: To allow an inspection process for heat flux sensors to be completed in a shorter period of time.SOLUTION: A heat flux sensor 10 is sandwiched between a heater plate 206 and a cooling unit 210. The heat flux sensor 10 has the heater plate 206 disposed on one surface thereof and the cooling unit 210 disposed on the other surface, and the heater plate 206 has a heat dissipation measurement work 205 disposed on a side opposite the heat flux sensor 10. With such an arrangement, the heater plate 206 only needs to be controlled to be kept at ambient temperature, and thus requires only a short period of time to stabilize the temperature, unlike the case where the heater plate 206 is heated to a temperature other than ambient temperature.SELECTED DRAWING: Figure 10 |
