GAS ETCHING METHOD OF STAIN FILM,申请号JP19750131367-传众专利搜索

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发明名称	GAS ETCHING METHOD OF STAIN FILM
摘要
申请公布号	JPS5255865(A)	申请公布日期	1977.05.07
申请号	JP19750131367	申请日期	1975.11.04
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	OKANO HARUO;HORIIKE YASUHIRO;TABEI YOSHIO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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