VACUUM DEPOSITION PROCESS,申请号JP19750138848-传众专利搜索

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发明名称	VACUUM DEPOSITION PROCESS
摘要
申请公布号	JPS5262138(A)	申请公布日期	1977.05.23
申请号	JP19750138848	申请日期	1975.11.18
申请人	SHIMADZU SEISAKUSHO LTD	发明人	SOEJIMA KEIGI;HIRAI TERUSHI
分类号	G01N1/28;C23C14/14;C23C14/24	主分类号	G01N1/28
代理机构		代理人
主权项
地址

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