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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5272577(A)
申请公布日期
1977.06.17
申请号
JP19750148608
申请日期
1975.12.13
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TAKEI SAKAE
分类号
H01L21/768;H01L21/28;H01L21/283;H01L21/31;H01L23/522
主分类号
H01L21/768
代理机构
代理人
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地址
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