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经营范围
发明名称
SEMICONDUCTOR DEVICE AND ITS PRODUCTION
摘要
申请公布号
JPS52100975(A)
申请公布日期
1977.08.24
申请号
JP19760017070
申请日期
1976.02.20
申请人
HITACHI LTD
发明人
ODA MAKOTO;HITANO YOUICHI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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