PLATE FORM OBJECT FLUID TREATMENT APPARATUS,申请号JP19760073153-传众专利搜索

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发明名称	PLATE FORM OBJECT FLUID TREATMENT APPARATUS
摘要
申请公布号	JPS52156565(A)	申请公布日期	1977.12.27
申请号	JP19760073153	申请日期	1976.06.23
申请人	HITACHI LTD	发明人	ISHII SEIICHI
分类号	H01L21/306;H01L21/302	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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