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发明名称
EINDIFFUNDIEREN VON ARSEN IN SILICIUMPLAETTCHEN
摘要
申请公布号
DE2634427(B2)
申请公布日期
1978.01.05
申请号
DE19762634427
申请日期
1976.07.30
申请人
发明人
分类号
C30B31/06;H01L21/223
主分类号
C30B31/06
代理机构
代理人
主权项
地址
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