INSPECTION JIG, SUBSTRATE INSPECTION DEVICE, AND MANUFACTURING METHOD FOR INSPECTION JIG

摘要

PROBLEM TO BE SOLVED: To provide an inspection jig and a substrate inspection device, which can improve the contact stability for a probe on an inspection point.SOLUTION: A counter plate 51 and a support plate 61 are provided. The counter plate 51 is provided with a plurality of pairs of a current insertion hole Hf for inserting a probe Pf and a detection insertion hole Hs for inserting a probe Ps. The support plate 61 is provided with a support hole H61 for inserting the probe Pf and a support hole H61 for inserting the probe Ps in correspondence to the current insertion hole Hf and the detection insertion hole Hs. In each of the current insertion hole Hf and the detection insertion hole Hs constituting the pair, wall surfaces F1 and S1 of the mutual inner wall surfaces that are away from the other insertion hole are inclined to be separated from the other insertion hole as away from a facing surface F.SELECTED DRAWING: Figure 5