发明名称 |
METHODS FOR THE SELECTIVE REMOVAL OF ASHED SPIN-ON GLASS |
摘要 |
A semi-aqueous removal composition and process for selectively removing spin-on glass relative to a metal gate and/or ILD material from a microelectronic device having said material thereon. The semi-aqueous removal composition can be a fluoride-containing composition or an alkaline composition. |
申请公布号 |
SG10201607609Y(A) |
申请公布日期 |
2016.10.28 |
申请号 |
SG10201607609Y |
申请日期 |
2013.03.12 |
申请人 |
ENTEGRIS, INC. |
发明人 |
WU, HSING-CHEN;TU, SHENG-HUNG |
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