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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPS5368978(A)
申请公布日期
1978.06.19
申请号
JP19760145095
申请日期
1976.12.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
YADA TOSHIO;ENDOU ATSUSHI;SHIMA YURI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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