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经营范围
发明名称
FORMING METHOD FOR THROUGH HOLE ON INSULATING FILM
摘要
申请公布号
JPS5371564(A)
申请公布日期
1978.06.26
申请号
JP19760146515
申请日期
1976.12.08
申请人
HITACHI LTD
发明人
KACHI TADAO;HONMA YOSHIO
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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