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申请公布号
JPS5397964(U)
申请公布日期
1978.08.09
申请号
JP19770001234U
申请日期
1977.01.11
申请人
发明人
分类号
H01L21/68;H01L21/301;H01L21/302;H01L21/461;(IPC1-7):H01L21/302
主分类号
H01L21/68
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