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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPS5397373(A)
申请公布日期
1978.08.25
申请号
JP19770011639
申请日期
1977.02.07
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TAKEUCHI HIROSHI;KINOSHITA HIROSHI
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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