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发明名称
摘要
申请公布号
JPS53124646(U)
申请公布日期
1978.10.04
申请号
JP19770029640U
申请日期
1977.03.14
申请人
发明人
分类号
H01L21/288;H01L21/445;(IPC1-7):H01L21/288
主分类号
H01L21/288
代理机构
代理人
主权项
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