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发明名称
MANUFACTURE OF INSULATING GATE FIELD EFFECT TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53141585(A)
申请公布日期
1978.12.09
申请号
JP19770056713
申请日期
1977.05.16
申请人
NIPPON ELECTRIC CO
发明人
TOKUYAMA KENJI
分类号
H01L29/78;H01L21/265;H01L29/06
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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