Anodizing a compound semiconductor

摘要

A method of anodizing a compound semiconductor comprises (1) PLATING A METAL ON THE COMPOUND SEMICONDUCTOR, (2) CONTACTING THE EXPOSED SURFACE OF THE METAL WITH AN ELECTROLYTE WHICH PERMITS ANODIC OXIDATION OF THE METAL, AND (3) PASSING AN ELECTRIC CURRENT THROUGH THE ELECTROLYTE WITH THE EXPOSED SURFACE OF THE METAL ACTING AS AN ANODE, THE CURRENT DENSITY NOT EXCEEDING 100 MICROAMPS PER SQUARE CENTIMETER OF THE SURFACE AND THE QUANTITY OF CURRENT BEING MORE THAN SUFFICIENT TO OXIDIZE ANODICALLY ALL THE METAL.