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经营范围
发明名称
SILICON EPITAXIAL GROWTH FURNACE
摘要
申请公布号
JPS5438280(A)
申请公布日期
1979.03.22
申请号
JP19770105315
申请日期
1977.08.31
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
MIZUNO OSAMU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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