| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink jet type recording head which can prevent air bubbles in a pressure chamber from entering a nozzle and can prevent dot missing.SOLUTION: An ink jet type recording head has a silicon substrate 14, a nozzle plate 12, a piezo electric element 13, and a back plate 16. The silicon substrate 14 is provided with a pressure chamber 14a over a span from one end surface to the other end surface thereof. The nozzle plate 12 is located on said one end surface of the silicon substrate 14, and has a diaphragm 30 and a nozzle hole 12a. The silicon substrate 14 has a partition 18 which is formed integrally with the end surface on the back plate 16 side, and plurally partitions the pressure chamber 14a. A first end connection 16a is located at one end of the pressure chamber 14a, and a second end connection 16b is located at the other end of the pressure chamber 14a. The partition 18 is provided between the first end connection 16a and the second end connection 16b over a span from one side wall surface to the other side wall surface of the pressure chamber 14a, said one side wall surface and the other side wall surface facing each other.SELECTED DRAWING: Figure 4 |
