| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing method capable of achieving high quality laser processing without crack while maintaining positional accuracy.SOLUTION: A laser processing method comprises: a step for coating a surface of a glass substrate 11 which is a workpiece with a hydrophilic film 21 as a cooling coat; and a step for transporting the glass substrate 11 coated with the hydrophilic film 21 at constant speed, scanning laser beam by a galvano-scanner by cooperative control, radiating laser beam to the glass substrate 11 through the hydrophilic film 21, then forming a penetration hole 12 on an area where the laser beam is radiated.SELECTED DRAWING: Figure 4 |
