摘要 |
PROBLEM TO BE SOLVED: To provide a high performance and compact filter cleaning device and a filter cleaning method for pushing out foreign matter collected to the filter material inside, by effectively cleaning up to the filter material inside from a surface of a filter, by including fine foreign matter of sub μm stuck to a fiber surface.SOLUTION: A filter (2) for collecting foreign matter to a filter material of entangling fiber in a mesh shape is carried, and a cleaning liquid (6) is injected into the filter from above this carried filter (2), and the foreign matter is separated from the filter by vibrating the filter by a vibrator (10) from below the filter in an injection position of the cleaning liquid, and high pressure gas (8) is injected from above the carried filter on the downstream side of the injection position of the cleaning liquid, and the foreign matter separated from the filter is pushed out to an external part of the filter by vibrating the filter by a separate vibrator from below the filter in an injection position of the high pressure gas.SELECTED DRAWING: Figure 1 |