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发明名称
NANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5482981(A)
申请公布日期
1979.07.02
申请号
JP19770150817
申请日期
1977.12.14
申请人
NIPPON ELECTRIC CO
发明人
NAKAMAE MASAHIKO
分类号
H01L21/76;H01L21/331;H01L29/08;H01L29/72;H01L29/73
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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