| 发明名称 |
System and Method for a MEMS Transducer |
| 摘要 |
According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas. |
| 申请公布号 |
US2016377569(A1) |
申请公布日期 |
2016.12.29 |
| 申请号 |
US201514749102 |
申请日期 |
2015.06.24 |
| 申请人 |
Infineon Technologies AG |
发明人 |
Rajaraman Vijaye Kumar;Arnanthigo Yonsuang;Dehe Alfons;Kolb Stefan |
| 分类号 |
G01N27/22;B81C1/00;B81B3/00 |
主分类号 |
G01N27/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microelectromechanical systems (MEMS) transducer comprising:
a substrate comprising a first cavity that passes through the substrate from a backside of the substrate; a perforated first electrode plate overlying the first cavity on a topside of the substrate; a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region; and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate, wherein the gas sensitive material has an electrical property that is dependent on a concentration of a target gas. |
| 地址 |
Neubiberg DE |
