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发明名称
ELECTRODE STRUCTURE FOR SEMICONDUCTOR WAFER PLASMA ETCHING STRIPPING DEVICE
摘要
申请公布号
JPS54128284(A)
申请公布日期
1979.10.04
申请号
JP19780036399
申请日期
1978.03.29
申请人
KOKUSAI ELECTRIC CO LTD
发明人
OGI HITOSHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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