| 摘要 |
This invention relates to an interferometric laser method and apparatus for sensing the acoustic wave responsive deformation of a workpiece surface. A laser provides a coherent beam of light which after reflection at the workpiece surface is split into a first measuring beam portion and a second reference beam portion, the latter portion being delayed by being transmitted over a long delay path. The optical length of the delay path is dimensioned to be a multiple integer of the optical length of the resonator of the laser.
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