Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article

摘要

The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate, and a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face of the mirror, wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators, and the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center and a periphery of the mirror.

主权项

1. An optical apparatus that deforms a reflecting surface of a mirror, comprising:
a base plate; a fixing member configured to fix a part of the mirror, the part including a center of the mirror, to the base plate; and a plurality of actuators for deforming the reflecting surface of the mirror, wherein each of the plurality of actuators has a first end connected to the mirror and a second end connected to the base plate, and is configured to apply force to a back face on an opposite side of the reflecting surface, the plurality of actuators include a plurality of first actuators and a plurality of second actuators for deforming the reflecting surface of the mirror, a distance between the first end and the second end of the second actuator changes greater than that of the first actuator when receiving a unit amount of external force, and the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center of the mirror and a periphery of the mirror.