REFINING OF SEMICONDUCTOR ETCHING ALKALINE LIQUID,申请号JP19780147022-传众专利搜索

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发明名称	REFINING OF SEMICONDUCTOR ETCHING ALKALINE LIQUID
摘要
申请公布号	JPS5574142(A)	申请公布日期	1980.06.04
申请号	JP19780147022	申请日期	1978.11.28
申请人	FUJI ELECTRIC CO LTD	发明人	YAMAGUCHI KAZUO
分类号	H01L21/308;H01L21/306	主分类号	H01L21/308
代理机构		代理人
主权项
地址

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