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发明名称
THIN FILM FORMING METHOD
摘要
申请公布号
JPS5591975(A)
申请公布日期
1980.07.11
申请号
JP19780163764
申请日期
1978.12.28
申请人
SUWA SEIKOSHA KK
发明人
KAWACHI AKIHIKO
分类号
C23C14/50;C23C14/34
主分类号
C23C14/50
代理机构
代理人
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地址
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