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发明名称
ETCHING
摘要
申请公布号
JPS55119173(A)
申请公布日期
1980.09.12
申请号
JP19790025535
申请日期
1979.03.07
申请人
HITACHI LTD
发明人
TSUJITA YOSHIYUKI;OOKI NOBUAKI;KANEKO MASAO
分类号
H05K3/06;C23F1/00;H01L21/302
主分类号
H05K3/06
代理机构
代理人
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