发明名称 Method and structure for passivating semiconductor material
摘要 A structure for passivating semiconductor material comprises a substrate of crystalline semiconductor material, a relatively thin film of carbon disposed on a surface of the crystalline material, and a layer of hydrogenated amorphous silicon deposited on the carbon film.
申请公布号 US4254426(A) 申请公布日期 1981.03.03
申请号 US19790037379 申请日期 1979.05.09
申请人 RCA CORPORATION 发明人 PANKOVE, JACQUES I.
分类号 H01L21/56;H01L23/29;H01L23/31;(IPC1-7):H01L45/00 主分类号 H01L21/56
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