Supported membrane composite structure and its method of manufacture

摘要

A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thickness from 0.5 to 5 mu m are readily achieved. The method and resulting product is not limited to the above materials or to masks.