Cleaning apparatus

摘要

This cleaning apparatus includes a rotation holding unit that holds and rotates an object; a cleaning fluid spray unit that sprays a cleaning fluid onto a spot-like cleaning region on the object, which is held by the rotation holding unit; a cleaning region moving unit that moves at least one of the rotation holding unit and the cleaning fluid spray unit to relatively move the cleaning region from the rotation center of the object toward the outer peripheral side thereof; a layered air current forming unit that forms a layered air current entering the surface of the object so as to cover the periphery of the cleaning region from a backward side in the direction of movement of the cleaning region relative to the rotation center; and a layered air current moving unit that relatively moves the incoming position of the layered air current while following the relative movement of the cleaning region.

主权项

1. A cleaning apparatus comprising:
a rotary support jig for supporting the radial edge of an object to be cleaned, and for rotating the object in a plane having a center of rotation, the rotary support jig being configured to orient the object to be cleaned in a vertical fashion and having a at least one drive roller and at least one holding roller arranged along a circle corresponding to a radial edge of the object to be cleaned, at least one of the holding and driving rollers being configured to retract; a motor for causing the jig to rotate the object in the plane and around the center of rotation while the object is supported by the jig; a cleaning fluid nozzle for spraying a cleaning fluid along a first central axis which intersects with the plane, the cleaning fluid nozzle being configured for spot like cleaning of a region on the object to be cleaned; means for causing relative movement between the jig and the cleaning fluid nozzle while cleaning fluid is sprayed by the cleaning fluid nozzle such that a point at which the first central axis intersects the plane moves along a radial path relative the center of rotation; a gas nozzle for spraying a layer of gas along a second central axis; and means for moving the gas nozzle in concert with the cleaning fluid nozzle as the cleaning fluid nozzle moves along the radial path with the second central axis of the gas nozzle following the first central axis of the cleaning fluid nozzle relative to the direction of movement along the path.