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经营范围
发明名称
SPINNER COATING APPARATUS
摘要
申请公布号
JPS5670869(A)
申请公布日期
1981.06.13
申请号
JP19790146565
申请日期
1979.11.14
申请人
HITACHI LTD
发明人
HANNO TSUTOMU
分类号
B05C11/08;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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