Adjustable mask assembly for vacuum vapour deposition appts.. - is used especially for manufacturing solar cells on large substrates

摘要

The appts. is used to deposit several layers of different widths onto a substrate in several process steps while a mask is used to prevent deposits on strip-shaped zones of the substrate. The mask assembly consists of at least two frames (1,3) which can move w.r.t. each other; and each frame is provided with a grid of masking strips. By moving frames (1,3), the masking strips can partly or completely overlap each other so their width is varied. An eccentric drive unit (9) is pref. used to move frame (3) diagonally w.r.t. a stationary frame (1) to vary the width of the masking strips. For example, the appts. is used in depositing the sequence Cr; Cu; Ag; CdS on a substrate to mfr. solar cells.