| 摘要 |
PURPOSE:To eliminate the need for transmission pipe and lower the cost by forming a sealed space in part of a semiconductor pressure sensing element, a substrate fixing this element and their joining parts, and building a reference pressure in this space. CONSTITUTION:The space 14 formed by a concave semiconductor pressure sensing element 1 and a substrate 2 is sealed perfectly. The pressure sensing element 1 and substrate 2 which are joined are supported by supporting bars 15 by leaving a prescribed spacing from a package 6. If such constitution is disposed in fluid to which pressure P is applied, the pressure P is transmitted to the pressure sensing element 1 in the direction of an arrow through the hole 7 of a cover 8. As a result, this element 1 changes its resistances value according to the differential pressure between the pressure P and the pressure of the space 14, that is, the atmospheric pressure as a reference pressure and this change is obtained as an electric signal through lead wires 10, 11. |
