| 摘要 |
<p>A fluid circuit in a treatment device in which a treatment liquid (6) in a storage tank (2) is supplied to a heat exchanger (7) to control its temperature, one part of the treatment liquid (6) is supplied to a treatment tank (1), and the liquid remaining in the tank (1) is returned to the storage tank (2) where part of the conduit feeding the liquid (6) from the tank (2) to the tank (1) is common to that used by the conduit returning the liquid (6) from the heat exchanger (7) to the tank (2).</p> |
