| 摘要 |
PURPOSE:To obtain a simple-structure and high-reliability pallet carrying device for a continuous metallizing device, by carrying pallets, which are arranged linearly and continuously, to the treating device of each vaccum chamber or the like by an external linear driving mechanism. CONSTITUTION:Pallets 1- where sealing expanded parts 1B are provided and discs 2 and 2 are mounted on both sides are arranged in a line continuously and are carried linearly by a sequence-controlled oil pressure device 15 of an external mechanism and are carried to an inlet-side auxiliary vacuum chamber 9 where a seal door or the like is unnecessary, a high vacuum chamber 11, an outlet-side auxiliary vacuum chamber, etc., thus metallizing discs 2 continuously. By this simple constitution where the control for the seal door is unnecessary, a high-reliability pallet carrying device for the continuous metallizing device is obtained. |
