发明名称 Optical instruments for viewing a sample surface.
摘要 <p>The Figure shows the optical diagram of a static photometric polarimeter for deriving information about a sample (S). A beam from a laser source passes through a beam splitter (BS) which reflects part of the beam to a detector (D0) and transmits the remainder towards the specimen (S). The transmitted beam is plane polarised in a plane at 45 DEG to the incident plane. The reflection of the beam from the surface of sample (S) is passed to a polarizing beam splitter (PBS). One portion of the split reflected beam goes to a detector (Ds) which measures the perpendicular polarization component of the beam and the other portion of the split beam goes to the detector (Dp) which measures the parallel polarized portion of the reflected beam. The outputs of the detectors (D0), (Ds) and (Dp) are supplied to a data processor and information about the specimen derived.</p>
申请公布号 EP0075689(A1) 申请公布日期 1983.04.06
申请号 EP19820107229 申请日期 1982.08.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHASTANG, JEAN-CLAUDE ANDRE;HILDENBRAND, WALTER WILLIAM;LEVANONI, MENACHEM
分类号 G01N21/21;(IPC1-7):01N21/21;01J4/04 主分类号 G01N21/21
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