PROCESS FOR PRODUCING A SEMICONDUCTOR ELEMENT OF AMORPHOUS SILICON FOR THE CONVERSIUON OF LIGHT INTO ELECTRICAL ENERGY AND DEVICE FOR CARRYING OUT THE PROCESS

摘要

A method and device for manufacturing semiconductor elements of amorphous silicon which convert light into electrical energy comprising, supplying a silicon compound to a vessel, passing an electric field through the vessel sufficient to produce a glow discharge having free electrons in the vessel to precipitate amorphous silicon from the silicon compound onto a substrate in the vessel, and providing a magnetic field in the vessel which is directed substantially transversely to the electric field and is of a magnitude sufficient to conduct the free electrons along closed paths over the surface of the substrate.