| 摘要 |
An optical focusing error-detection device is disclosed which comprises a radiation-sensitive detector with four sub-detectors, and an astigmatic lens system arranged between the detector and the objective system whose focusing-error is to be detected. The astigmatic system is arranged in a non-collimated beam and comprises two cylindrical lenses having mutually perpendicular axes and having different powers so that the resulting focusing-error signal is symmetrical and linear around the zero point. |
