| 摘要 |
PURPOSE:To obtain a charged particle filter having excellent operationability where the charged particle having different energy and mass can be selected freely while the speed distribution can be varied for the charged particle having specific speed. CONSTITUTION:An arithmetic circuit 16 will perform the operation shown by second formula on the signals provided from an energy signal generating circuit 21, mass signal generating circuit 22, and speed distribution signal generating circuit 23, to apply the voltage corresponding to the second formula across the electrodes 11, 12 through an amplifier 17. Furthermore said circuit 16 will perform the operation corresponding to the third formula, to supply the current corresponding to the third formula to a coil 19 through said amplifier 18. In the formula, M is a signal corresponding to the mass of charged particle to be selected by the filter, Uo is a signal corresponding to the energy of charged particle provided to the filter, Ro is a signal corresponding to the speed distribution due to the filter and K1, K2 are constant. |
