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发明名称
摘要
申请公布号
JPS58142937(U)
申请公布日期
1983.09.27
申请号
JP19820039168U
申请日期
1982.03.18
申请人
发明人
分类号
H01L23/50;H01L21/60;H01L23/48;(IPC1-7):H01L21/60
主分类号
H01L23/50
代理机构
代理人
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