| 摘要 |
PROBLEM TO BE SOLVED: To provide a CVD platinum compound that can be formed into a film at a low temperature, and has sufficient thermal stability during storage and at a vaporization stage.SOLUTION: The present invention provides a CVD platinum compound in which a diimine comprising two imines, and an alkyl anion are coordinated to a divalent platinum represented by the formula, the CVD platinum compound having a high vapor pressure and a low decomposition temperature [R-Rare H, a C5 or less alkyl group, cyano group or the like; Rand R, alkyl anions, independently represent a C1-3 alkyl group].SELECTED DRAWING: Figure 2 |
