发明名称 Apparatus and method of material removal having a fluid filled slot
摘要 Apparatus and method for cleaning material at the outer edge of an object by applying a fluid, which can be a solvent, for the material to a flat surface adjacent the edge by contact and moving the solvent onto the edge by centrifugal force. A slot is provided in a planar surface. The slot is filled with solvent for contact with the flat surface of the object.
申请公布号 US4439244(A) 申请公布日期 1984.03.27
申请号 US19820404798 申请日期 1982.08.03
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 ALLEVATO, TONY E.
分类号 G03F7/30;(IPC1-7):B08B7/00 主分类号 G03F7/30
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