发明名称 |
Apparatus and method of material removal having a fluid filled slot |
摘要 |
Apparatus and method for cleaning material at the outer edge of an object by applying a fluid, which can be a solvent, for the material to a flat surface adjacent the edge by contact and moving the solvent onto the edge by centrifugal force. A slot is provided in a planar surface. The slot is filled with solvent for contact with the flat surface of the object.
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申请公布号 |
US4439244(A) |
申请公布日期 |
1984.03.27 |
申请号 |
US19820404798 |
申请日期 |
1982.08.03 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
ALLEVATO, TONY E. |
分类号 |
G03F7/30;(IPC1-7):B08B7/00 |
主分类号 |
G03F7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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