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发明名称
MANUFACTURE OF SILANE FROM TRICHLOROSILANE
摘要
申请公布号
JPS5954617(A)
申请公布日期
1984.03.29
申请号
JP19830076312
申请日期
1983.05.02
申请人
ROONU PUURAN SUPESHIARITE SHIMIIKU
发明人
JIYAN RIYUKU RUPAAJIYU;JIERAARU SHIMON
分类号
C01B33/04;C01B33/107
主分类号
C01B33/04
代理机构
代理人
主权项
地址
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