发明名称 MAGNETISCH GELAGERTE TURBOMOLEKULARPUMPE MIT SCHWINGUNGSDAEMPFUNG
摘要 <p>A turbo-molecular pump with passive, radial magnetic bearings and axial bearings has both direct and indirect damping arrangements for unwanted oscillations. Direct damping is produced by eddy currents produced in copper rings around the magnetic stators of the magnetic bearings. Indirect damping is provided through a platform, carried by springs and connected to the pump housing by oscillation dampers.</p>
申请公布号 DE3239328(A1) 申请公布日期 1984.04.26
申请号 DE19823239328 申请日期 1982.10.23
申请人 ARTHUR PFEIFFER VAKUUMTECHNIK WETZLAR GMBH 发明人 BECKER,WILLI,ING.(GRAD.)DR.
分类号 F04D19/04;F04D29/04;F04D29/046;F04D29/05;F04D29/058;F16C32/04;F16C39/06;(IPC1-7):04D19/04;16C32/04 主分类号 F04D19/04
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