TURBOPOMPE MOLECULAIRE MONTEE MAGNETIQUEMENT AVEC AMORTISSEMENT DES VIBRATIONS

摘要

A turbo-molecular pump with passive, radial magnetic bearings and axial bearings has both direct and indirect damping arrangements for unwanted oscillations. Direct damping is produced by eddy currents produced in copper rings around the magnetic stators of the magnetic bearings. Indirect damping is provided through a platform, carried by springs and connected to the pump housing by oscillation dampers.