| 摘要 |
The present invention relates to a composition comprising a silane modified metal oxide, wherein the silane modified metal oxide comprises a metal oxide having attached at least one silyl group, and wherein the silyl group comprises at least one —SO3−M+, —OSO3−M+, —SSO3−M+, —NHSO3−M+, —NR′SO3−M+, —NR′3+A−, or -Q+A− group. R′, which can be the same or different, is a branched or unbranched, substituted or unsubstituted alkyl, alkenyl or alkynyl group or a substituted or unsubstituted aryl, heteroaryl, alkylaryl; or arylalkyl group, M+ is a cationic counterion, and A− is a anionic counterion. The present invention further relates to the silane modified metal oxide used in the disclosed chemical mechanical polishing composition. |
| 主权项 |
1. A chemical mechanical polishing composition comprising at least one silane modified metal oxide, wherein the silane modified metal oxide comprises a metal oxide having attached at least one non-zwitterionic silyl group having the formula —Si(X)n[(R″-HET)mL-(R−I)]3−n, wherein X, which can independently be the same or different, is —OH, a hydrolyzable substituent, a non-hydrolyzable substituent, or an oxygen-containing substituent having the formula —O-G- wherein G is a Si of a silicon-containing group or a surface metal atom of the metal oxide; R and R″ are independently a branched or unbranched alkylene, alkenylene, or alkynylene group or an arylene, heteroarylene, alkylarylene; or arylalkylene group; HET is a heteroatom group; L is a linking group; m is 0, 1, 2, 3, 4, 5, or 6; n is 0, 1, or 2; and I is a —SO3−M+, —OSO3−M+, —SSO3−M+, —NHSO3−M+, —NR′SO3−M+, —NR′3+A−, or -Q+A− group, wherein R′, which can be the same or different, is a branched or unbranched, substituted or unsubstituted alkyl, alkenyl or alkynyl group or a substituted or unsubstituted aryl, heteroaryl, alkylaryl; or arylalkyl group, Q+ is a heterocyclic or heteroaromatic quaternary ammonium group, M+ is a cationic counterion, and A− is a anionic counterion. |
