| 摘要 |
PURPOSE:To enable to perform a plasma treatment with favorable uniformity and reproducibility, by a method wherein two or more sets of plasma-generating electrodes are provided with probes, and electric power supplied to each of the electrodes is controlled in accordance with plasma characteristics obtained by the probes. CONSTITUTION:Power sources 4 are independently fitted respectively to two or more sets of plasma-generating electrodes 3, and one or more sets of probes 8 for measuring plasma characteristics are provided for each set of electrodes 3, and a means 10 for adjusting the electric power supplied to each of the electrodes 3 in accordance with the plasma characteristics obtained by the probes 8 is provided for the power source 4 for each set. Accordingly, a continuous plasma treatment effected by the passage of a material 11 to be treated along a long path can be performed stably, uniformly and with favorable reproducibility.
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