| 发明名称 | Holding table | ||
| 摘要 | A holding table for holding a platelike workpiece which includes a base and an annular holding member attached to the base. The annular holding member has an annular holding surface for holding the outer circumferential portion of the platelike workpiece thereon. Accordingly, a central recess is defined by the base and the annular holding member so as to be surrounded by the annular holding member. The annular holding member is formed with a suction opening exposed to the annular holding surface, a vacuum line having one end communicating with the suction opening and the other end connected to a vacuum source, a discharge opening exposed to the annular holding surface at a position radially outside of the suction opening, and a fluid line having one end communicating with the discharge opening and the other end connected to a fluid source. | ||
| 申请公布号 | US9463542(B2) | 申请公布日期 | 2016.10.11 |
| 申请号 | US201313887501 | 申请日期 | 2013.05.06 |
| 申请人 | DISCO CORPORATION | 发明人 | Komatsu Atsushi;Kitaura Takeshi;Kataoka Masamichi |
| 分类号 | H01L21/304;B23Q3/08;H01L21/67;H01L21/683;B23Q1/38 | 主分类号 | H01L21/304 |
| 代理机构 | Greer Burns & Crain, Ltd. | 代理人 | Greer Burns & Crain, Ltd. |
| 主权项 | 1. A holding table for holding a platelike workpiece, comprising: a base; and an annular holding member attached to the base, the annular holding member having an annular holding surface for holding an outer circumferential portion of the platelike workpiece thereon, whereby a central recess is defined by the base and the annular holding member so as to be surrounded by the annular holding member; the annular holding member being formed with a suction opening exposed to the annular holding surface, a vacuum line having one end communicating with the suction opening and the other end connected to a vacuum source, a discharge opening exposed to the annular holding surface at a position radially outside of the suction opening, and a fluid line having one end communicating with the discharge opening and the other end connected to a fluid source, wherein the annular holding member is formed of resin. | ||
| 地址 | Tokyo JP | ||