| 摘要 |
<p>A dryer in which a drying gas is blown onto a thin material such as a silicon wafer uniformly, and which prevents the generation of static electricity. A table-shaped rotor (13) is mounted in the lower portion of a cabinet (12), with a supporter (14) of a carrier (15) for the thin material on the periphery of the rotor. An air-suction opening (18), coaxial with rotor (13)"s center of rotation, is provided in a cover (17) mounted on the upper end of the cabinet (12) and a plurality of flow-adjusting members (19) are attached concentrically about the air-suction opening (18) on the back-side of the cover (17). The gaps between flange-portions (23) of the flow-adjusting members (19) form air-flow paths (24). The flange-portions (23) have devices (25) for eliminating static electricity. </p> |
